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SERVICE

Laser Repair Equipment


Hi-precision mask-type repair equipment, which is the fruit of precision mechanics technology and laser optics technology.

Feature

  • High throughput
    - Lump process per sub-pixel unit
    - High-performance mask alignment techniques
    - Fully automatic process using AOI defect information
  • High quality repair
    - Using precision mask
    - Unique design method for applied uniform optics

Application

  • • a-Si TFT Array
  • • p-Si TFT Array

Specification

Lens magnification 5x 10x 20x
Process area 1.0mm² 0.5mm² 0.25mm²
Resolution 2um 1.3um 0.7um

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